Microfabrication for Industrial Applications

Microfabrication for Industrial Applications

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This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.

Concerning sub-micron feature manufacture, the book explains: the philosophy… (more)

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Book Details  

Publisher: William Andrew (August 31, 2011)

Format: EPUB

Page count: 312 pages

File size: 4.4 MB

Protection: DRM

Language: English

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