Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies

for $ 244.35

244.35 Handbook of Silicon Based MEMS Materials and Technologies http://covers.feedbooks.net/item/257282.jpg?t=1404267607 http://www.feedbooks.com/item/257282/handbook-of-silicon-based-mems-materials-and-technologies?utm_medium=uwishlist&utm_source=amazon

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.

Key topics covered include:

  • Silicon as MEMS material
  • Material properties and measurement techniques
  • Analytical methods used in materials characterization
  • Modeling in MEMS
  • Measuring MEMS
  • Micromachining technologies in MEMS
  • Encapsulation of MEMS components
  • Emerging process technologies, including ALD and porous… (more)

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Book Details  


Publisher: William Andrew (December 08, 2009)

Format: EPUB

Page count: 700 pages

File size: 18.3 MB

Protection: DRM

Language: English


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