Ari Lehto

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Handbook of Silicon Based MEMS Materials and Technologies

by Veikko Lindroos, Markku Tilli & Ari Lehto

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.

Key topics covered include:

  • Silicon as...

Handbook of Silicon Based MEMS Materials and Technologies

by Veikko Lindroos, Markku Tilli & Ari Lehto

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.

Key topics covered include:

  • Silicon as...